Publications
New types of silicon torsion microspring and their characterization
- Author(s)
- Werner Brenner, Gh. Haddad, Harald Rennhofer, Marcus Rennhofer, Aleksandar Vujanic, Gordana Popovic
- Organisation(s)
- Dynamics of Condensed Systems
- External organisation(s)
- Technische Universität Wien
- Volume
- 4019
- Pages
- 463-470
- No. of pages
- 7
- DOI
- https://doi.org/10.1117/12.382305
- Publication date
- 2000
- Austrian Fields of Science 2012
- 1030 Physics, Astronomy
- Portal url
- https://ucris.univie.ac.at/portal/en/publications/new-types-of-silicon-torsion-microspring-and-their-characterization(79c83bf9-6bd2-4e9f-abbc-12cbe9577008).html