Publications

New types of silicon torsion microspring and their characterization

Author(s)
Werner Brenner, Gh. Haddad, Harald Rennhofer, Marcus Rennhofer, Aleksandar Vujanic, Gordana Popovic
Organisation(s)
Dynamics of Condensed Systems
External organisation(s)
Technische Universität Wien
Volume
4019
Pages
463-470
No. of pages
7
DOI
https://doi.org/10.1117/12.382305
Publication date
2000
Austrian Fields of Science 2012
1030 Physics, Astronomy
Portal url
https://ucrisportal.univie.ac.at/en/publications/new-types-of-silicon-torsion-microspring-and-their-characterization(79c83bf9-6bd2-4e9f-abbc-12cbe9577008).html